PR60/80L vacuum plasma cleaning machine
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| Number | Content | Specification Parameters |
|---|---|---|
| 1 | Machine specifications | PR60L：920mm(W)× 960mm(D)×1720mm（H） PR80L：920mm(W)×1030mm(D)×1720mm（H） |
| 2 | Vacuum Chamber Specifications | PR60L: imported aluminum400(W)×400(H)×400(D)mm PR80L: imported aluminum 450(W)×400(H)×450(D)mm |
| 3 | Electrode Specifications | PR60L： 6-layer flat electrode plate（380(W)×310(D)mm） PR80L：8-layer flat electrode plate（420(W)×360(D)mm） |
| 4 | Control System | Touch screen + PLC control |
| 5 | Vacuum measurement system | Pirani resistance vacuum gauge |
| 6 | Gas Metering System | Accurate mass flow controller MFC |
| 7 | Number of gas channels | 2 way air intake, 1 way vent |
| 8 | Plasma generator | 500W&1KW plasma source, 40KHz (optional 13.56MHz) |
| 9 | Working gas | 2 working gases are optional: Ar2, N2, H2, O2 |
| Features: High precision, fast response, good handling and compatibility, perfect functions and professional technical support. Uses: Suitable for camera and industry, mobile phone manufacturing, semiconductor IC field, silicone, plastic, polymer field, automotive electronics industry, aviation industry, etc. 1. Camera and fingerprint identification industry: deoxidize the gold PAD surface of soft and hard board; IR surface cleaning and cleaning; 2. Semiconductor IC field: COB, COG, COF, ACF process, used for cleaning before bonding and welding; 3. Silica gel, plastic, and polymer fields: surface roughening, etching, and activation of silica gel, plastic, and polymers. |
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