Number | Content | Specification Parameters |
---|---|---|
1 | Machine model | OKSUN-RTR2000L-W800H |
2 | Handle width | 100mm~800mm (can be customized) |
3 | Vacuum chamber | 2000L (can be customized) |
4 | Power Systems | 2KW~10KW plasma source |
5 | Control System | Touch screen + PLC automatic control |
6 | Intake system | Standard 2-way working gas, expandable to 5-way working gas (Ar2, N2, H2, CF4, O2) |
Machine use: vacuum roll-to-roll equipment for processing PI polyimide film and FPC flexible circuit board; equipment features: mainly used for processing 100-600mm wide materials, the materials are processed horizontally inside the vacuum chamber, and the loading and unloading Simple and can be used in etching process. |
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