PM175L vacuum plasma cleaning machine
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| Number | Content | Specification Parameters |
|---|---|---|
| 1 | Machine specifications | 1400(W)×1720(H)×1100(D)mm |
| 2 | Vacuum Chamber Specifications | 550(W)×635(H)×535(D)mm |
| 3 | Electrode Specifications | Imported aluminum electrode 532(L)×412(W)mm |
| 4 | Control System | Touch screen + PLC control |
| 5 | Vacuum measurement system | Pirani resistance vacuum gauge |
| 6 | Gas Metering System | Accurate mass flow controller MFC |
| 7 | Number of gas channels | 2 way air intake, 1 way vent |
| 8 | Plasma generator | 500W&1KW plasma source, 40KHz (optional 13.56MHz) |
| 9 | Working gas | 2 working gases are optional: Ar2, N2, H2, O2 |
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