Microwave plasma treatment system
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| Number | Content | Specification Parameters |
|---|---|---|
| 1 | Project | Solid state source version/Magnetron version |
| 2 | Output power | 250W×8/1.25kW×2 |
| 3 | OUTPUT FREQUENCY | 2400MHz-2500MHz adjustable/2450MHz ± 25MHz |
| 4 | Frequency error | ±50ppm/1-2% |
| 5 | Microwave leakage | ≤2mW/cm2 |
| 6 | Cooling method | water-cooling |
| 7 | Process Gas | Ar, O2, H2, CF4, etc |
| 8 | Plasma treatment area | 0.19m2/0.15m2 |
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